The FTS 8101.EC O-frame is based on the combisensor principle equipped with non-contact capacitive sensors. The distance between sensor and film is measured with the capacitive sensor. The eddy-current sensors ensures the thickness signal by a reference measurement to a second target. The system can be integrated in the flat layer section.
- 100% non-contact measurement principle
- Resolution <0.1µm
- Adaptable traversing speed