The FTS 8102.EC C-frame is based on the combisensor principle equipped with non-contact capacitive sensors. The distance between sensor and film is measured with the capacitive sensor. The eddy-current sensors ensures the thickness signal by a reference measurement to a second target. The system is designed as a C-frame and can be used as a traversing unit by using the linear axis.
- 100% non-contact measurement principle
- Resolution <0.1µm
- Adaptable traversing speed